发明授权
US09275934B2 Through-package-via (TPV) structures on inorganic interposer and methods for fabricating same 有权
无机插入物上的封装通孔(TPV)结构及其制造方法

Through-package-via (TPV) structures on inorganic interposer and methods for fabricating same
摘要:
Aspects of the present disclosure generally relate to a microelectronic package including a plurality of through vias having walls in a glass interposer having a top portion and a bottom portion. The microelectric package may also include a stress relief barrier on at least a portion of the top and bottom portions of the glass interposer. The microelectric package may further include a metallization seed layer on at least a portion of the stress relief layer and a conductor on at least a portion of the metallization seed layer. The conductor extends through at least a portion of the plurality of the through vias, forming a plurality of metalized through package vias. At least a portion of the through vias are filled with the stress relief layer or the metallization seed layer.
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