发明授权
US09275934B2 Through-package-via (TPV) structures on inorganic interposer and methods for fabricating same
有权
无机插入物上的封装通孔(TPV)结构及其制造方法
- 专利标题: Through-package-via (TPV) structures on inorganic interposer and methods for fabricating same
- 专利标题(中): 无机插入物上的封装通孔(TPV)结构及其制造方法
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申请号: US13582453申请日: 2011-03-03
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公开(公告)号: US09275934B2公开(公告)日: 2016-03-01
- 发明人: Venkatesh Sundaram , Fuhan Liu , Rao Tummala , Vijay Sukumaran , Vivek Sridharan , Qiao Chen
- 申请人: Venkatesh Sundaram , Fuhan Liu , Rao Tummala , Vijay Sukumaran , Vivek Sridharan , Qiao Chen
- 申请人地址: US GA Atlanta
- 专利权人: GEORGIA TECH RESEARCH CORPORATION
- 当前专利权人: GEORGIA TECH RESEARCH CORPORATION
- 当前专利权人地址: US GA Atlanta
- 代理机构: Troutman Sanders LLP
- 代理商 Ryan A. Schneider; Alexis N. Simpson
- 国际申请: PCT/US2011/027071 WO 20110303
- 国际公布: WO2011/109648 WO 20110909
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/768 ; H01L21/48 ; H01L23/15 ; H01L23/31 ; H01L23/498
摘要:
Aspects of the present disclosure generally relate to a microelectronic package including a plurality of through vias having walls in a glass interposer having a top portion and a bottom portion. The microelectric package may also include a stress relief barrier on at least a portion of the top and bottom portions of the glass interposer. The microelectric package may further include a metallization seed layer on at least a portion of the stress relief layer and a conductor on at least a portion of the metallization seed layer. The conductor extends through at least a portion of the plurality of the through vias, forming a plurality of metalized through package vias. At least a portion of the through vias are filled with the stress relief layer or the metallization seed layer.
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