Invention Grant
US09275962B2 Probe pad with indentation 有权
带缩进的探针垫

Probe pad with indentation
Abstract:
An integrated electronic circuit having probe indentations filled by a hard covering substance. The integrated circuit device results from a process of manufacture including forming a substrate comprising a plurality of functional components of the electronic circuit, creating a plurality of conductive layers on such substrate to form an electric contact region with high hardness equal to or greater than a first hardness value of about 300 HV, contacting the electric contact region with a probe thereby causing an indentation. In an embodiment, the process further comprises, after the test run, creating a covering conductive layer on at least one part of the electric contact region contacted by the probe to fill the indentation.
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