Invention Grant
- Patent Title: Cell pillar structures and integrated flows
- Patent Title (中): 细胞柱结构和综合流
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Application No.: US13838579Application Date: 2013-03-15
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Publication No.: US09276011B2Publication Date: 2016-03-01
- Inventor: Fatma Arzum Simsek-Ege , Krishna K. Parat
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/66 ; H01L29/788 ; H01L29/792

Abstract:
Various embodiments comprise apparatuses and methods, such as a memory stack having a continuous cell pillar. In various embodiments, the apparatus includes a source material, a buffer material, a select gate drain (SGD), and a memory stack arranged between the source material and the SGD. The memory stack comprises alternating levels of conductor materials and dielectric materials. A continuous channel-fill material forms a cell pillar that is continuous from the source material to at least a level corresponding to the SGD.
Public/Granted literature
- US20140264533A1 CELL PILLAR STRUCTURES AND INTEGRATED FLOWS Public/Granted day:2014-09-18
Information query
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