发明授权
- 专利标题: Semiconductor device and fabricating method thereof
- 专利标题(中): 半导体器件及其制造方法
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申请号: US14161744申请日: 2014-01-23
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公开(公告)号: US09276116B2公开(公告)日: 2016-03-01
- 发明人: Shigenobu Maeda , Tsukasa Matsuda , Hidenobu Fukutome
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR
- 专利权人: Samsung Elecronics Co., Ltd.
- 当前专利权人: Samsung Elecronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel & Sibley, P.A.
- 优先权: KR10-2013-008118 20130124
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/417 ; H01L29/66
摘要:
A semiconductor device is provided. The semiconductor device includes a first fin on a substrate, a first gate electrode formed on the substrate to intersect the first fin, a first elevated source/drain on the first fin on both sides of the first gate electrode, and a first metal alloy layer on an upper surface and sidewall of the first elevated source/drain.
公开/授权文献
- US20140203370A1 Semiconductor Device and Fabricating Method Thereof 公开/授权日:2014-07-24
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