Invention Grant
- Patent Title: Microelectromechanical gyroscope with enhanced rejection of acceleration noises
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Application No.: US14037163Application Date: 2013-09-25
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Publication No.: US09278847B2Publication Date: 2016-03-08
- Inventor: Gabriele Cazzaniga , Luca Coronato , Giacomo Calcaterra
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2008A0981 20081223
- Main IPC: G01C19/56
- IPC: G01C19/56 ; B81B3/00 ; G01C19/5712

Abstract:
An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.
Public/Granted literature
- US20140021564A1 MICROELECTROMECHANICAL GYROSCOPE WITH ENHANCED REJECTION OF ACCELERATION NOISES Public/Granted day:2014-01-23
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