公开(公告)号：US10364147B2

公开(公告)日：2019-07-30

申请号：US15687618

申请日：2017-08-28

Applicant: STMicroelectronics S.r.l.

Inventor： Marco Rossi ,  Sergio Mansueto Reina ,  Giacomo Calcaterra

IPC: G01R1/20 ,  B81C99/00 ,  G01R1/067 ,  G01R31/28 ,  G01M11/00 ,  G01R1/073

Abstract: A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.

公开(公告)号：US09278847B2

公开(公告)日：2016-03-08

申请号：US14037163

申请日：2013-09-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Giacomo Calcaterra

IPC: G01C19/56 ,  B81B3/00 ,  G01C19/5712

CPC classification number: B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

Abstract: An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

公开(公告)号：US20140021564A1

公开(公告)日：2014-01-23

申请号：US14037163

申请日：2013-09-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Giacomo Calcaterra

IPC: B81B3/00

CPC classification number: B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

Abstract: An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

Abstract translation: 集成的微机电结构设置有驱动质量块，通过弹性锚固元件锚固到基底，并被设计成在具有驱动运动的平面中被致动; 以及第一感测质量块和第二感测质量块，悬挂在驱动质量块内并通过相应的弹性支撑元件联接到驱动质量块，以便在所述驱动运动中相对于其固定，并响应于角度来执行相应的检测运动 速度。 特别地，第一感测质量和第二感测质量通过弹性耦合元件连接在一起，被配置为耦合其振动模式。

公开(公告)号：US20180237293A1

公开(公告)日：2018-08-23

申请号：US15687618

申请日：2017-08-28

Applicant: STMicroelectronics S.r.l.

Inventor： Marco Rossi ,  Sergio Mansueto Reina ,  Giacomo Calcaterra

IPC: B81C99/00 ,  G01M11/00 ,  G01R31/28 ,  G01R1/067

CPC classification number: B81C99/005 ,  G01M11/005 ,  G01R1/067 ,  G01R1/07307 ,  G01R31/2886 ,  G01R31/2889

Abstract: A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.