Invention Grant
US09279674B2 Method of testing blocking ability of photoresist blocking layer for ion implantation
有权
用于离子注入的光刻胶阻挡层的封闭能力的测试方法
- Patent Title: Method of testing blocking ability of photoresist blocking layer for ion implantation
- Patent Title (中): 用于离子注入的光刻胶阻挡层的封闭能力的测试方法
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Application No.: US14376790Application Date: 2013-11-19
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Publication No.: US09279674B2Publication Date: 2016-03-08
- Inventor: Hui Tian
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201310385397 20130829
- International Application: PCT/CN2013/087442 WO 20131119
- International Announcement: WO2015/027577 WO 20150305
- Main IPC: G01B15/02
- IPC: G01B15/02 ; G03F7/20 ; G01Q60/24

Abstract:
A method of testing a blocking ability of a photoresist blocking layer for ion implantation, comprising: forming a photoresist blocking layer (S1) on a substrate; measuring a first thickness (S2) of the photoresist blocking layer at an arbitrary position on the substrate, the first thickness being a thickness of the photoresist blocking layer; implanting a predetermined amount of ions (S3) into the photoresist blocking layer; measuring a second thickness (S4) of the photoresist blocking layer at the arbitrary position, the second thickness being a thickness of a hardened portion in the photoresist blocking layer; and determining a blocking ability (S5) of the photoresist blocking layer with the first thickness for ion implantation according to the second thickness. This method does not need to use a testing silicon slice during the process of testing the blocking ability of a photoresist blocking layer for ion implantation, and thus can reduce required costs during the testing process.
Public/Granted literature
- US20150168138A1 METHOD OF TESTING BLOCKING ABILITY OF PHOTORESIST BLOCKING LAYER FOR ION IMPLANTATION Public/Granted day:2015-06-18
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