Invention Grant
- Patent Title: Method and system for printing high-resolution periodic patterns
- Patent Title (中): 打印高分辨率周期图案的方法和系统
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Application No.: US13979489Application Date: 2012-01-10
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Publication No.: US09280056B2Publication Date: 2016-03-08
- Inventor: Francis Clube , Harun Solak
- Applicant: Francis Clube , Harun Solak
- Applicant Address: CH Villigen/PSI
- Assignee: EULITHA A.G.
- Current Assignee: EULITHA A.G.
- Current Assignee Address: CH Villigen/PSI
- Agent Laurence Greenberg; Werner Stemer; Ralph Locher
- International Application: PCT/IB2012/050128 WO 20120110
- International Announcement: WO2012/095795 WO 20120719
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method for printing a desired periodic pattern includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with the light while varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes. The layer is exposed to a time-integrated intensity distribution that prints the desired pattern. The separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.
Public/Granted literature
- US20130308112A1 METHOD AND SYSTEM FOR PRINTING HIGH-RESOLUTION PERIODIC PATTERNS Public/Granted day:2013-11-21
Information query
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