Invention Grant
- Patent Title: High capacity TEM grid
- Patent Title (中): 大容量TEM网格
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Application No.: US14251739Application Date: 2014-04-14
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Publication No.: US09281163B2Publication Date: 2016-03-08
- Inventor: Brian Roberts Routh, Jr. , Valerie Brogden , Michael Schmidt
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; Nathan H. Calvert
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; G01N1/44
Abstract:
A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.
Public/Granted literature
- US20150294834A1 High Capacity TEM Grid Public/Granted day:2015-10-15
Information query
