Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US14355664Application Date: 2012-07-03
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Publication No.: US09281398B2Publication Date: 2016-03-08
- Inventor: Huaxiang Yin , Changliang Qin , Xiaolong Ma , Qiuxia Xu , Dapeng Chen
- Applicant: Huaxiang Yin , Changliang Qin , Xiaolong Ma , Qiuxia Xu , Dapeng Chen
- Applicant Address: CN Beijing
- Assignee: The Institute of Microelectronics, Chinese Academy of Science
- Current Assignee: The Institute of Microelectronics, Chinese Academy of Science
- Current Assignee Address: CN Beijing
- Agency: Treasure IP Group, LLC
- Priority: CN201210170314 20120528
- International Application: PCT/CN2012/000914 WO 20120703
- International Announcement: WO2013/177725 WO 20131205
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/78 ; H01L29/66 ; H01L29/10

Abstract:
The present invention discloses a semiconductor device, which comprises a substrate, a gate stack structure on the substrate, a channel region in the substrate under the gate stack structure, and source and drain regions at both sides of the channel region, wherein there is a stressed layer under and at both sides of the channel region, in which the source and drain regions are formed. According to the semiconductor device and the method for manufacturing the same of the present invention, a stressed layer is formed at both sides of and under the channel region made of a silicon-based material so as to act on the channel region, thereby effectively increasing the carrier mobility of the channel region and improving the device performance.
Public/Granted literature
- US20150179797A1 Semiconductor Structure and Method for Manufacturing the Same Public/Granted day:2015-06-25
Information query
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