发明授权
- 专利标题： MEMS and method of manufacturing the same
- 专利标题（中）： MEMS及其制造方法
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申请号： US13413889申请日： 2012-03-07
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公开(公告)号： US09287050B2公开(公告)日： 2016-03-15
- 发明人: Tomohiro Saito
- 申请人： Tomohiro Saito
- 申请人地址： JP Tokyo
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2011-054334 20110311
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; H01G5/18 ; B81C1/00
摘要：
According to one embodiment, a MEMS includes a first electrode, a first auxiliary structure and a second electrode. The first electrode is provided on a substrate. The first auxiliary structure is provided on the substrate and adjacent to the first electrode. The first auxiliary structure is in an electrically floating state. The second electrode is provided above the first electrode and the first auxiliary structure, and is driven in a direction of the first electrode.
公开/授权文献
- US20120228726A1 MEMS AND METHOD OF MANUFACTURING THE SAME 公开/授权日：2012-09-13
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