Invention Grant
- Patent Title: Method of forming wirings
- Patent Title (中): 形成布线的方法
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Application No.: US14497501Application Date: 2014-09-26
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Publication No.: US09287161B2Publication Date: 2016-03-15
- Inventor: Sang-Hyun Lee , Myeong-Cheol Kim , Yoo-Jung Lee , Il-Sup Kim , Seung-Ju Park
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0145696 20131121
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/311

Abstract:
A method of manufacturing a wiring includes sequentially forming a first insulation layer, a first layer, and a second layer on a substrate, etching an upper portion of the second layer a plurality of times to form a second layer pattern including a first recess having a shape of a staircase, etching a portion of the second layer pattern and a portion of the first layer under the first recess to form a first layer pattern including a second recess having a shape of a staircase similar to the first recess, etching a portion of the first layer pattern under the second recess to form a first opening exposing a portion of a top surface of the first insulation layer, etching the exposed portion of the first insulation layer to form a second opening through the first insulation layer, and forming a wiring filling the second opening.
Public/Granted literature
- US20150140810A1 METHOD OF FORMING WIRINGS Public/Granted day:2015-05-21
Information query
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