Invention Grant
- Patent Title: Vertical transistor devices, memory arrays, and methods of forming vertical transistor devices
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Application No.: US14699350Application Date: 2015-04-29
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Publication No.: US09287271B2Publication Date: 2016-03-15
- Inventor: Kuo Chen Wang , Sriraj Manavalan , Wei Ming Liao
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L21/8239
- IPC: H01L21/8239 ; H01L27/108 ; H01L29/66 ; H01L21/8238

Abstract:
A vertical transistor device includes a line of active area adjacent a line of dielectric isolation. A buried data/sense line obliquely angles relative to the line of active area and the line of dielectric isolation. A pair of gate lines is outward of the buried data/sense line and obliquely angle relative to the line of active area and the line of dielectric isolation. A vertical transistor channel region is within the active area between the pair of gate lines. An outer source/drain region is in the active area above the channel region and an inner source/drain region is in the active area below the channel region. The inner source/drain region is electrically coupled to the buried data/sense line. Other devices and structures are contemplated, as are methods of forming a plurality of vertical transistor devices.
Public/Granted literature
- US20150236023A1 Vertical Transistor Devices, Memory Arrays, And Methods Of Forming Vertical Transistor Devices Public/Granted day:2015-08-20
Information query
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