发明授权
- 专利标题: Optical position-measuring device
- 专利标题(中): 光学位置测量装置
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申请号: US14135043申请日: 2013-12-19
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公开(公告)号: US09291481B2公开(公告)日: 2016-03-22
- 发明人: Markus Meissner , Wolfgang Holzapfel
- 申请人: DR. JOHANNES HEIDENHAIN GMBH
- 申请人地址: DE Traunreut
- 专利权人: DR. JOHANNES HEIDENHAIN GMBH
- 当前专利权人: DR. JOHANNES HEIDENHAIN GMBH
- 当前专利权人地址: DE Traunreut
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102012223887 20121220
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01D5/38 ; G01B11/00
摘要:
An optical position-measuring device is adapted to detect the position of an object in several spatial degrees of freedom. The object is disposed in a manner allowing it to move at least along a first direction of movement and along a second direction of movement. The position-measuring device includes at least one light source and at least one first and second measuring standard which are located on the object, extend along a first extension direction and a second extension direction and include graduation regions disposed periodically along the first and second extension directions. In addition, a scanning plate is provided, into which at least first and second retroreflector elements are integrated, the first retroreflector element extending parallel to the first extension direction and the second retroreflector element extending parallel to the second extension direction, and via which, sub-beams that fall on them from the first and second measuring standard, are reflected back in the direction of the respective measuring standard. From superposed sub-beams, a detector system is able to generate position signals at least with respect to the movement of the object along the first and second direction of movement.
公开/授权文献
- US20140185057A1 Optical Position-Measuring Device 公开/授权日:2014-07-03
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