Invention Grant
US09291669B2 Semiconductor device, test structure of the semiconductor device, and method of testing the semiconductor device 有权
半导体器件,半导体器件的测试结构以及半导体器件的测试方法

Semiconductor device, test structure of the semiconductor device, and method of testing the semiconductor device
Abstract:
A semiconductor device, a test structure of the semiconductor device, and a method of testing the semiconductor device are provided. The test structure including a first pad and a second pad being separated from each other, and a first test element and a second test element connected between the first pad and the second pad, a first value of a characteristic parameter of the first test element being different from a second value of the characteristic parameter of the second test element, may be provided.
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