Invention Grant
US09293522B2 Method of manufacturing capacitor and display apparatus including the same 有权
制造电容器的方法和包括该电容器的显示装置

Method of manufacturing capacitor and display apparatus including the same
Abstract:
Provided is a method of manufacturing a capacitor of a display apparatus, the display apparatus being formed on a substrate and including a thin film transistor, which includes an active layer, a gate electrode, and source and drain electrodes, a display device connected to the thin film transistor, and the capacitor, the method including: forming an electrode layer on the substrate; forming a passivation layer on the electrode layer; patterning the passivation layer to form a first pattern including first branch patterns parallel to each other, and a second pattern including second branch patterns parallel to each other and interposed between the first branch patterns; and forming first and second electrodes by etching the electrode layer using the first and second patterns as masks.
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