Invention Grant
US09293522B2 Method of manufacturing capacitor and display apparatus including the same
有权
制造电容器的方法和包括该电容器的显示装置
- Patent Title: Method of manufacturing capacitor and display apparatus including the same
- Patent Title (中): 制造电容器的方法和包括该电容器的显示装置
-
Application No.: US13972844Application Date: 2013-08-21
-
Publication No.: US09293522B2Publication Date: 2016-03-22
- Inventor: Seong-Min Wang , Mu-Gyeom Kim , Tae-An Seo , Gug-Rae Jo , Dae-Young Lee , Jung-Gun Nam , Dae-Hwan Jang
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2013-0011497 20130131
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/786 ; H01L49/02 ; H01L27/12 ; H01L27/32 ; G02F1/1362

Abstract:
Provided is a method of manufacturing a capacitor of a display apparatus, the display apparatus being formed on a substrate and including a thin film transistor, which includes an active layer, a gate electrode, and source and drain electrodes, a display device connected to the thin film transistor, and the capacitor, the method including: forming an electrode layer on the substrate; forming a passivation layer on the electrode layer; patterning the passivation layer to form a first pattern including first branch patterns parallel to each other, and a second pattern including second branch patterns parallel to each other and interposed between the first branch patterns; and forming first and second electrodes by etching the electrode layer using the first and second patterns as masks.
Public/Granted literature
- US20140210050A1 METHOD OF MANUFACTURING CAPACITOR AND DISPLAY APPARATUS INCLUDING THE SAME Public/Granted day:2014-07-31
Information query
IPC分类: