发明授权
- 专利标题: Plasma deposition apparatus and plasma deposition method
- 专利标题(中): 等离子体沉积装置和等离子体沉积方法
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申请号: US14124014申请日: 2011-08-30
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公开(公告)号: US09297075B2公开(公告)日: 2016-03-29
- 发明人: Atsuro Hama
- 申请人: Atsuro Hama
- 申请人地址: JP Tokyo
- 专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Posz Law Group, PLC
- 国际申请: PCT/JP2011/069642 WO 20110830
- 国际公布: WO2013/030959 WO 20130307
- 主分类号: C23C16/50
- IPC分类号: C23C16/50 ; C23C16/24 ; C23C16/458 ; C23C16/509 ; H01J37/32
摘要:
A plasma deposition apparatus that includes a high-frequency electrode caused to face a deposition target and a ground electrode connected to the deposition target, and deposits a film on the deposition target by using plasma generated between the high-frequency electrode and the ground electrode, wherein the high-frequency electrode includes a first high-frequency electrode caused to face a first deposition target surface of the deposition target, and a second high-frequency electrode caused to face a second deposition target surface on the opposite side of the first deposition target surface, and the first high-frequency electrode, the second high-frequency electrode, and the ground electrode generate plasma between the first high-frequency electrode and the ground electrode for performing deposition on the first deposition target surface and plasma between the second high-frequency electrode and the ground electrode for performing deposition on the second deposition target surface at the same time.
公开/授权文献
- US20140127425A1 PLASMA DEPOSITION APPARATUS AND PLASMA DEPOSITION METHOD 公开/授权日:2014-05-08
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