Invention Grant
- Patent Title: System and method for inspecting a sample using landing lens
- Patent Title (中): 使用着陆镜检查样品的系统和方法
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Application No.: US13772287Application Date: 2013-02-20
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Publication No.: US09297692B2Publication Date: 2016-03-29
- Inventor: Yoram Uziel , Alon Litman , Ofer Adan , Ron Naftali , Juergen Frosien
- Applicant: APPLIED MATERIALS ISRAEL, LTD.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01J1/02
- IPC: G01J1/02 ; G01J1/04 ; G01N21/88 ; G02B21/00 ; G02B21/24 ; G01N21/95 ; G01N21/956 ; G02B13/00

Abstract:
An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
Public/Granted literature
- US20140231632A1 SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS Public/Granted day:2014-08-21
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