Invention Grant
US09297692B2 System and method for inspecting a sample using landing lens 有权
使用着陆镜检查样品的系统和方法

System and method for inspecting a sample using landing lens
Abstract:
An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
Public/Granted literature
Information query
Patent Agency Ranking
0/0