Invention Grant
US09299537B2 Radial waveguide systems and methods for post-match control of microwaves
有权
用于微波后匹配控制的径向波导系统和方法
- Patent Title: Radial waveguide systems and methods for post-match control of microwaves
- Patent Title (中): 用于微波后匹配控制的径向波导系统和方法
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Application No.: US14221132Application Date: 2014-03-20
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Publication No.: US09299537B2Publication Date: 2016-03-29
- Inventor: Satoru Kobayashi , Soonam Park , Dmitry Lubomirsky , Hideo Sugai
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H01J37/32 ; H01J37/244

Abstract:
A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.
Public/Granted literature
- US20150270105A1 RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICROWAVES Public/Granted day:2015-09-24
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