Invention Grant
US09302358B2 Chamber elements and a method for placing a chamber at a load position 有权
腔室元件和用于将腔室放置在负载位置的方法

Chamber elements and a method for placing a chamber at a load position
Abstract:
Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.
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