Invention Grant
- Patent Title: Method for fabricating a magnetic writer using multiple etches of damascene materials
- Patent Title (中): 用多层蚀刻材料制造磁性刻录机的方法
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Application No.: US14280342Application Date: 2014-05-16
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Publication No.: US09305583B1Publication Date: 2016-04-05
- Inventor: Jinqiu Zhang , Feng Liu , Hongmei Han , Ming Sun , Xiaotian Zhou
- Applicant: Western Digital (Fremont), LLC
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/31
- IPC: G11B5/31 ; G11B5/855 ; G11B5/127

Abstract:
A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.
Information query
IPC分类: