公开(公告)号：US10315354B2

公开(公告)日：2019-06-11

申请号：US14902359

申请日：2015-03-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hideki Matsumoto ,  Tomonobu Saku

IPC: G03F7/00 ,  B29C43/02 ,  B29C43/56 ,  B29C59/02 ,  H01L21/683 ,  G11B5/855 ,  B29C31/00 ,  B29C59/00 ,  H01L21/67 ,  B82Y40/00

Abstract: An imprint apparatus includes a nozzle including a discharge outlet which discharges imprint material onto the substrate, a supply unit configured to supply a gas which accelerates filling of a pattern of a mold with the imprint material, and a gas unit provided with the nozzle. The gas unit performs gas supply or exhaust with respect to a second space around a first space between the nozzle and a portion of the substrate which faces the nozzle and is conveyed under the nozzle in order to suppress the gas from flowing into the first space.

公开(公告)号：US10180623B2

公开(公告)日：2019-01-15

申请号：US15666695

申请日：2017-08-02

Applicant: FUJIFILM Corporation

Inventor： Satoshi Wakamatsu ,  Tadashi Omatsu

IPC: G03F7/00 ,  B41J2/21 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855

Abstract: The disclosed nanoimprinting method suppresses fluctuations in thickness of residual film and defects due to residual gas in a resist film, onto which a pattern of protrusions and recesses is transferred, in a nanoimprinting method that employs the ink jet method to coat a substrate with droplets of resist material. Droplets are coated onto a substrate such that the spaces between the droplets along an A direction which is substantially parallel to the direction of the lines of a linear pattern of protrusions and recesses are longer than the spaces between the droplets in a B direction which is substantially perpendicular to the A direction, in a nanoimprinting method that coats a substrate with the droplets of a resist material using the ink jet method.

公开(公告)号：US10026431B2

公开(公告)日：2018-07-17

申请号：US15032951

申请日：2014-10-31

Applicant: Carnegie Mellon University

Inventor： David M. Bromberg ,  Lawrence Pileggi ,  Jian-Gang Zhu

IPC: G11C11/14 ,  G11B5/73 ,  G11B5/855 ,  G11B5/714 ,  G11B5/84 ,  G11B5/65 ,  G11B5/851 ,  G11B5/00

Abstract: This disclosure relates to a memory device that includes at least one magnetic track on a substrate, wherein the at least one magnetic track comprises one or more magnetic domains. Contacts can be disposed on the at least one magnetic track according to a predetermined arrangement to form a plurality of bitcells on the at least one magnetic track, wherein each one of the plurality of bitcells is configured to store at least one magnetic domain. The device can include a timing circuit connected to the contacts, with the timing circuit being configured to apply to the contacts multiple phases of electric currents according to a predetermined timing sequence to cause the at least one magnetic domain to shift from the each one of the plurality of bitcells to an adjacent one of the plurality of bitcells on the at least one magnetic track.

公开(公告)号：US10008220B2

公开(公告)日：2018-06-26

申请号：US15596109

申请日：2017-05-16

Applicant: SHOWA DENKO K.K.

Inventor： Takayuki Fukushima ,  Yuji Murakami ,  Tetsuya Kanbe ,  Lei Zhang ,  Kazuya Niwa ,  Hisato Shibata

IPC: G11B5/82 ,  G11B5/187 ,  G11B5/706 ,  G11B5/74 ,  G11B5/716 ,  G11B5/855 ,  G11B5/39 ,  G11B5/66 ,  G11B5/73 ,  G11B5/84 ,  G11B5/65

CPC classification number: G11B5/1875 ,  G11B5/398 ,  G11B5/65 ,  G11B5/66 ,  G11B5/706 ,  G11B5/70615 ,  G11B5/716 ,  G11B5/73 ,  G11B5/743 ,  G11B5/82 ,  G11B5/8404 ,  G11B5/855

Abstract: A magnetic recording medium includes a substrate; a lower base layer formed on the substrate; and a (001) oriented L10 magnetic layer formed on the lower base layer and including a first magnetic layer formed on the lower base layer and having a granular structure of magnetic grains and a grain boundary portion, the grain boundary portion containing C, and a second magnetic layer formed on the first magnetic layer and having a granular structure of magnetic grains and a grain boundary portion, the grain boundary portion containing oxide or nitride, the second magnetic layer further containing one or more elements selected from a group consisting of Mg, Ni, Zn, Ge, Pd, Sn, Ag, Re, Au and Pb as an additive.

公开(公告)号：US09818535B2

公开(公告)日：2017-11-14

申请号：US14592152

申请日：2015-01-08

Applicant: Dmitri Litvinov ,  Long Chang

Inventor： Dmitri Litvinov ,  Long Chang

IPC: B05D5/12 ,  H01F41/22 ,  G11B5/65 ,  G11B5/855 ,  H01F10/12 ,  C23C14/00 ,  C23C14/08 ,  C23C14/58 ,  H01F10/14 ,  H01F10/16

CPC classification number: H01F41/22 ,  C23C14/0036 ,  C23C14/085 ,  C23C14/5806 ,  C23C14/5846 ,  G11B5/65 ,  G11B5/855 ,  H01F10/123 ,  H01F10/14 ,  H01F10/16

Abstract: In the systems and methods for synthesizing a thin film with desired properties (e.g. magnetic, conductivity, photocatalyst, etc.), a metal oxide film may be deposited on a substrate. The metal oxide film may be achieved utilizing any suitable method. A reducing agent may be deposited before, after or both before and after the metal oxide layer. Oxygen may be removed or liberated from the deposited metal oxide film by low temperature local or global annealing. As a result of the annealing to remove oxygen, one or more portions of the metal oxide may be transformed into materials with desired properties. As a nonlimiting example, a metal oxide film may be treated to provide a magnetic multilayer film that is suitable for bit patterned media.

公开(公告)号：US09809887B2

公开(公告)日：2017-11-07

申请号：US15052701

申请日：2016-02-24

Applicant: Seagate Technology LLC

Inventor： Michael R. Feldbaum ,  Justin Jia-Jen Hwu ,  David S. Kuo ,  Gennady Gauzner ,  Kim Yang Lee ,  Li-Ping Wang

IPC: C23F4/00 ,  B82Y40/00 ,  B82Y10/00 ,  G03F7/00 ,  G11B5/855

CPC classification number: C23F4/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/855 ,  Y10T428/265

Abstract: The embodiments disclose a method of fabricating a stack, including replacing a metal layer of a stack imprint structure with an oxide layer, patterning the oxide layer stack using chemical etch processes to transfer the pattern image and cleaning etch residue from the stack imprint structure to substantially prevent contamination of the metal layers.

公开(公告)号：US09786304B1

公开(公告)日：2017-10-10

申请号：US15199540

申请日：2016-06-30

Applicant: Western Digital (Fremont), LLC

Inventor： Shawn M. Tanner ,  Mingjun Yu ,  Min Zheng ,  Kyung Lee ,  Tsung Yuan Chen

IPC: B44C1/22 ,  G11B5/31 ,  G11B5/855 ,  C23C14/58 ,  G11B5/00

CPC classification number: C23C14/5873 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B5/855 ,  G11B2005/0021

Abstract: A method for fabricating a near-field transducer (NFT) for a heat assisted magnetic recording (HAMR) write apparatus is described. The HAMR write apparatus is coupled with a laser for providing energy and has a media-facing surface (MFS) configured to reside in proximity to a media during use. The method includes providing a stack on an underlayer. The stack includes an endpoint detection layer, an optical layer and an etchable layer. The optical layer is between the etchable and endpoint detection layers. The etchable layer is patterned to form a mask. A portion of the optical layer is removed. A remaining portion of the optical layer has a bevel at a bevel angle from the MFS location. The bevel angle is nonzero and acute. The NFT is provided such that the NFT has an NFT front surface adjoining the bevel and at the bevel angle from the MFS location.

公开(公告)号：US09633685B2

公开(公告)日：2017-04-25

申请号：US14039044

申请日：2013-09-27

Applicant: Agency for Science, Technology and Research

Inventor： Karthik Kumar ,  Kwang Wei Joel Yang ,  Huigao Duan ,  Mohamed Asbahi

IPC: B05D5/12 ,  H01L21/302 ,  G11B7/0037 ,  G11B7/24035 ,  B82Y10/00 ,  G11B7/005 ,  G11B7/26 ,  G11C13/04 ,  B82Y30/00 ,  G11B5/855 ,  G11B7/1353 ,  G11B7/013 ,  G11B7/2433

CPC classification number: G11B7/0037 ,  B82Y10/00 ,  B82Y30/00 ,  G11B5/855 ,  G11B7/0052 ,  G11B7/1353 ,  G11B7/24035 ,  G11B7/2433 ,  G11B7/26 ,  G11B7/261 ,  G11B7/266 ,  G11B2007/0136 ,  G11C13/048 ,  Y10S977/858 ,  Y10T428/24802

Abstract: According to embodiments of the present invention, a method of writing to an optical data storage medium is provided. The method includes receiving a plurality of data elements, each data element having one of a plurality of values, wherein each value of the plurality of values is associated with a wavelength, and forming, for each data element, a nanostructure arrangement on the optical data storage medium, the nanostructure arrangement configured to reflect light of the wavelength associated with the value of the data element in response to a light irradiated on the optical data storage medium. According to further embodiments of the present invention, a method of reading from an optical data storage medium and an optical data storage medium are also provided.

公开(公告)号：US20170084300A1

公开(公告)日：2017-03-23

申请号：US15233277

申请日：2016-08-10

Applicant: Seagate Technology LLC

Inventor： ShuaiGang Xiao ,  XiaoMin Yang ,  David S. Kuo ,  Kim Yang Lee ,  Yautzong Hsu

IPC: G11B5/855 ,  G11B5/596 ,  G11B20/12

CPC classification number: G11B5/855 ,  G11B5/59633 ,  G11B20/1217 ,  G11B2020/1281

Abstract: Provided herein is a method including forming a data zone guiding pattern and forming a servo zone guiding pattern. A servo pattern and a data pattern are simultaneously formed. Directed self-assembly of block copolymers is guided by the data zone guiding pattern and the servo zone guiding pattern.

公开(公告)号：US09489974B2

公开(公告)日：2016-11-08

申请号：US14251303

申请日：2014-04-11

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： XiaoMin Yang ,  Shuaigang Xiao ,  Kim Y. Lee ,  Koichi Wago ,  Philip Steiner

IPC: G06F7/00 ,  G11B5/855 ,  G03F7/00

CPC classification number: G11B5/746 ,  G03F7/0002 ,  G11B5/855

Abstract: The embodiments disclose a method including patterning a template substrate to have different densities using hierarchical block copolymer density patterns in different zones including a first pattern and a second pattern, using a first directed self-assembly to pattern a first zone in the substrate using a first block copolymer material, and using a second directed self-assembly to pattern a second zone in the substrate using a second block copolymer material.

Abstract translation: 实施方案公开了一种方法，其包括使用第一定向自组装使用第一和第二图案在第一图案和第二图案中分层嵌段共聚物密度图案在不同区域中图案化模板基底以具有不同的密度，以使用第一 嵌段共聚物材料，并且使用第二定向自组装来使用第二嵌段共聚物材料在基材中图案化第二区域。