Invention Grant
- Patent Title: Methods and devices for securing and transporting singulated die in high volume manufacturing
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Application No.: US14142761Application Date: 2013-12-28
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Publication No.: US09305816B2Publication Date: 2016-04-05
- Inventor: John C. Johnson , Peter A. Davison , Eric J. Moret , Lawrence M. Palanuk , Gregory A. Stone
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Konrad Raynes Davda & Victor LLP
- Agent Alan S. Raynes
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/78 ; H01L21/677 ; H01L21/683 ; H01L21/687 ; H05K13/00 ; H01L21/673 ; H01L21/68

Abstract:
A method includes identifying a wafer position for a plurality of die on a wafer, storing the wafer position for each of the plurality of die in a database, dicing the wafer into a plurality of singulated die, positioning each of the singulated die in a die position location on a tray, and storing the die position on the tray for each of the singulated die in the database. The database includes information including the wafer position associated with each die position. The tray is transported to a processing tool, and at least one of the plurality of singulated die is removed from the die position on the tray and processed in the processing tool. The processed singulated die is replaced in the same defined location on the tray that the singulated die was positioned in prior to the processing. Other embodiments are described and claimed.
Public/Granted literature
- US20150187622A1 METHODS AND DEVICES FOR SECURING AND TRANSPORTING SINGULATED DIE IN HIGH VOLUME MANUFACTURING Public/Granted day:2015-07-02
Information query
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