Invention Grant
- Patent Title: Transfer-bonding method for light emitting devices
- Patent Title (中): 发光装置的转印方法
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Application No.: US14583594Application Date: 2014-12-27
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Publication No.: US09306117B2Publication Date: 2016-04-05
- Inventor: Ming-Hsien Wu , Ying-Chien Chu , Shih-Hao Wang , Yen-Hsiang Fang , Mu-Tao Chu
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW101118745A 20120525
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00 ; H01L27/15 ; H01L25/075 ; H01L33/44 ; H01L33/58

Abstract:
A transfer-bonding method for light emitting devices including following steps is provided. A plurality of light emitting devices is formed over a first substrate and is arranged in array, wherein each of the light emitting devices includes a device layer and an interlayer sandwiched between the device layer and the first substrate. A protective layer is formed over the first substrate to selectively cover parts of the light emitting devices, and other parts of the light emitting devices are uncovered by the protective layer. The device layers uncovered by the protective layer are bonded with a second substrate. The interlayers uncovered by the protective layer are removed, so that parts of the device layers uncovered by the protective layer are separated from the first substrate and are transfer-bonded to the second substrate.
Public/Granted literature
- US20150111329A1 TRANSFER-BONDING METHOD FOR LIGHT EMITTING DEVICES Public/Granted day:2015-04-23
Information query
IPC分类: