发明授权
- 专利标题: Negative resist composition and patterning process using same
- 专利标题(中): 负光刻胶组合物和使用其的图案化工艺
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申请号: US14564764申请日: 2014-12-09
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公开(公告)号: US09310681B2公开(公告)日: 2016-04-12
- 发明人: Jun Hatakeyama , Hiroyuki Urano , Masashi Iio
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2014-003194 20140110
- 主分类号: G03F7/038
- IPC分类号: G03F7/038 ; G03F7/30 ; G03F7/40 ; H01L21/027 ; C08G8/28
摘要:
A negative resist composition containing as base resin a novolak resin having repeating unit “a”, wherein R1 represents a hydrogen atom, a hydroxy group, or any of a linear, a branched, or a cyclic alkyl group, alkoxy group, acyl group, acyloxy group, and alkoxy carbonyl group, these groups having 1 to 6 carbon atoms; and R2 represents a hydrogen atom, any of a linear, a branched, or cyclic alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 10 carbon atoms, aryl group having 6 to 10 carbon atoms, which may contain a hydroxy group, an alkoxy group, an ether group, a thioether group, a carboxyl group, an alkoxy carbonyl group, and an acyloxy group. “A” is within the range of 0
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