Invention Grant
US09315335B2 Conveyance system 有权
运输系统

Conveyance system
Abstract:
A conveyance system includes a storage case, a lifting/lowering apparatus, a handover apparatus, and a conveying apparatus. The lifting/lowering apparatus lifts and lowers the storage case to position each substrate stored in the storage case to a receiving position sequentially. The handover apparatus receives the substrate at the receiving position, and hand over the substrate to the conveying apparatus at a handover position. The conveying apparatus includes a pair of belts. The pair of belts is provided such that the belts are spaced apart from each other in a left-right direction. A plurality of profiles associated with each other are provided on the pair of belts, respectively. The profiles associated with each other are configured to move together in a conveying direction, support outer edges of the substrate handed over at the handover position, and position the substrate to a prescribed position.
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