Invention Grant
- Patent Title: Conveyance system
- Patent Title (中): 运输系统
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Application No.: US14348693Application Date: 2012-09-06
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Publication No.: US09315335B2Publication Date: 2016-04-19
- Inventor: Kenji Bando
- Applicant: Kenji Bando
- Applicant Address: JP Kobe
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe
- Agency: Oliff PLC
- Priority: JP2011-214256 20110929
- International Application: PCT/JP2012/005654 WO 20120906
- International Announcement: WO2013/046552 WO 20130404
- Main IPC: B65G47/06
- IPC: B65G47/06 ; B65G47/52 ; B65G49/06 ; H01L21/677

Abstract:
A conveyance system includes a storage case, a lifting/lowering apparatus, a handover apparatus, and a conveying apparatus. The lifting/lowering apparatus lifts and lowers the storage case to position each substrate stored in the storage case to a receiving position sequentially. The handover apparatus receives the substrate at the receiving position, and hand over the substrate to the conveying apparatus at a handover position. The conveying apparatus includes a pair of belts. The pair of belts is provided such that the belts are spaced apart from each other in a left-right direction. A plurality of profiles associated with each other are provided on the pair of belts, respectively. The profiles associated with each other are configured to move together in a conveying direction, support outer edges of the substrate handed over at the handover position, and position the substrate to a prescribed position.
Public/Granted literature
- US20140291122A1 CONVEYANCE SYSTEM Public/Granted day:2014-10-02
Information query
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