Invention Grant
- Patent Title: Laser tracking interferometer
- Patent Title (中): 激光跟踪干涉仪
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Application No.: US14280743Application Date: 2014-05-19
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Publication No.: US09316487B2Publication Date: 2016-04-19
- Inventor: Masayuki Nara , Shinichiro Yanaka
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2013-109550 20130524
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/14 ; G01B11/00

Abstract:
A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.
Public/Granted literature
- US20140347673A1 LASER TRACKING INTERFEROMETER Public/Granted day:2014-11-27
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