Invention Grant
US09316487B2 Laser tracking interferometer 有权
激光跟踪干涉仪

Laser tracking interferometer
Abstract:
A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0