Invention Grant
- Patent Title: Linear high packing density for LED arrays
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Application No.: US14465482Application Date: 2014-08-21
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Publication No.: US09318360B2Publication Date: 2016-04-19
- Inventor: Joseph Johnson , Joseph M. Ranish
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: F21V21/00
- IPC: F21V21/00 ; H01L21/67

Abstract:
Apparatus for providing energy to a process chamber are provided herein. In one embodiment, the apparatus include a supporting substrate, a first plurality of solid state light sources disposed on a first surface of the supporting substrate, and a second plurality of solid state light sources disposed on the top surface of the supporting substrate, wherein the first and second plurality of solid state light sources are aligned and electrically isolated from each other, and the first plurality of solid state light sources is in physical contact with the second plurality of solid state light sources.
Public/Granted literature
- US20150103526A1 LINEAR HIGH PACKING DENSITY FOR LED ARRAYS Public/Granted day:2015-04-16
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