Invention Grant
- Patent Title: Semiconductor device having dummy cell array
- Patent Title (中): 具有虚拟单元阵列的半导体器件
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Application No.: US14493526Application Date: 2014-09-23
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Publication No.: US09318477B2Publication Date: 2016-04-19
- Inventor: Ji-myoung Lee , Young-soo Song , Bo-young Lee , Jun-min Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2013-0115698 20130927
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L21/8238 ; G11C7/14

Abstract:
A semiconductor device is disclosed. The semiconductor device includes a plurality of dummy gate lines parallel to each other in a first direction and extending in a second direction that is orthogonal to the first direction; a plurality of first dummy filling patterns between the plurality of dummy gate lines, the first dummy filling patterns parallel to each other in the first direction, and arranged apart from each other in the second direction; a plurality of first dummy vias on the plurality of first dummy filling patterns; and a plurality of first dummy wiring lines connected to the plurality of first dummy vias, the first dummy vias extending in the second direction, and parallel to each other in the first direction.
Public/Granted literature
- US20150091188A1 SEMICONDUCTOR DEVICE HAVING DUMMY CELL ARRAY Public/Granted day:2015-04-02
Information query
IPC分类: