Invention Grant
- Patent Title: Field effect transistor having germanium nanorod and method of manufacturing the same
- Patent Title (中): 具有锗纳米棒的场效应晶体管及其制造方法
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Application No.: US13973584Application Date: 2013-08-22
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Publication No.: US09318573B2Publication Date: 2016-04-19
- Inventor: Chang-Wook Moon , Joong S. Jeon , Jung-hyun Lee , Nae-In Lee , Yeon-Sik Park , Hwa-Sung Rhee , Ho Lee , Se-Young Cho , Suk-Pil Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey, & Pierce, P.L.C.
- Priority: KR10-2007-0043025 20070503
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/66 ; B82Y10/00 ; H01L29/10 ; H01L29/78 ; H01L29/786 ; H01L51/42 ; H01L29/06 ; B82Y15/00

Abstract:
A field effect transistor having at least one Ge nanorod and a method of manufacturing the field effect transistor are provided. The field effect transistor may include a gate insulation layer formed on a silicon substrate, at least one nanorod embedded in the gate insulation layer having both ends thereof exposed, a source electrode and a drain electrode connected to opposite sides of the at least one Ge nanorod, and a gate electrode formed on the gate insulation layer between the source electrode and the drain electrode.
Public/Granted literature
- US20130344664A1 FIELD EFFECT TRANSISTOR HAVING GERMANIUM NANOROD AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-12-26
Information query
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