Invention Grant
US09318573B2 Field effect transistor having germanium nanorod and method of manufacturing the same 有权
具有锗纳米棒的场效应晶体管及其制造方法

Field effect transistor having germanium nanorod and method of manufacturing the same
Abstract:
A field effect transistor having at least one Ge nanorod and a method of manufacturing the field effect transistor are provided. The field effect transistor may include a gate insulation layer formed on a silicon substrate, at least one nanorod embedded in the gate insulation layer having both ends thereof exposed, a source electrode and a drain electrode connected to opposite sides of the at least one Ge nanorod, and a gate electrode formed on the gate insulation layer between the source electrode and the drain electrode.
Information query
Patent Agency Ranking
0/0