Invention Grant
- Patent Title: U-shaped semiconductor structure
- Patent Title (中): U形半导体结构
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Application No.: US14590327Application Date: 2015-01-06
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Publication No.: US09318580B2Publication Date: 2016-04-19
- Inventor: Kangguo Cheng , Bruce B. Doris , Pouya Hashemi , Ali Khakifirooz
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/02 ; H01L29/78

Abstract:
A method for forming a U-shaped semiconductor device includes growing a U-shaped semiconductor material along sidewalls and bottoms of trenches, which are formed in a crystalline layer. The U-shaped semiconductor material is anchored, and the crystalline layer is removed. Backfilling is formed underneath the U-shaped semiconductor material with a dielectric material for support. A semiconductor device is formed with the U-shaped semiconductor material.
Public/Granted literature
- US20150126009A1 U-SHAPED SEMICONDUCTOR STRUCTURE Public/Granted day:2015-05-07
Information query
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