Invention Grant
- Patent Title: Method of manufacturing a MEMS micro-mirror assembly
- Patent Title (中): 制造MEMS微镜组件的方法
-
Application No.: US14382734Application Date: 2013-02-21
-
Publication No.: US09323047B2Publication Date: 2016-04-26
- Inventor: Faouzi Khechana , Nicolas Abele
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Kacvinsky Daisak Bluni PLLC
- International Application: PCT/EP2013/053483 WO 20130221
- International Announcement: WO2013/131759 WO 20130912
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81C3/00 ; H05K1/18 ; H05K3/32 ; B81C1/00 ; G02B7/182 ; G02B26/10 ; H05K1/11
Abstract:
According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).
Public/Granted literature
- US20150022872A1 METHOD OF MANUFACTURING A MEMS MICRO-MIRROR ASSEMBLY Public/Granted day:2015-01-22
Information query
