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    Electromagnetic actuator for optical device to reduce temperature and deformation
    2.
    发明授权
    Electromagnetic actuator for optical device to reduce temperature and deformation 有权
    用于光学装置的电磁致动器，以减少温度和变形

    公开(公告)号：US09467034B2

    公开(公告)日：2016-10-11

    申请号：US14353746

    申请日：2012-09-25

    Applicant: Intel Corporation

    Inventor： Julien Gamet ,  Faouzi Khechana

    IPC: H02K33/00 ,  H02K33/16 ,  H02K33/02 ,  G02B26/08 ,  B81B3/00 ,  H02K9/22

    CPC classification number: H02K33/00 ,  B81B3/0072 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/08 ,  G02B26/085 ,  H02K9/22 ,  H02K33/02 ,  H02K33/16

    Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

    Abstract translation: 根据本发明，提供了一种致动器，其包括可动构件，所述可动构件包括支撑框架，所述支撑框架被构造成使得其可围绕第一摆动轴线摆动并且反射镜被固定到所述支撑框架， 支撑框架将影响镜子的振荡; 线圈，其与支撑框架配合; 一个或多个边界部分设置在所述支撑框架和所述反射镜之间，当所述支撑框架围绕所述第一振荡轴线摆动时，所述边界部分减小从所述支撑框架的边缘传递到所述反射镜的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域，其中所述一个或多个切口区域被配置为平行于所述线圈的至少一部分，以在所述支撑框架绕所述线圈摆动时减小所述线圈上的应力 第一振荡轴和/或降低致动器的性质的温度依赖性。

    MEMS device
    7.
    发明授权
    MEMS device 有权

    公开(公告)号：US09651775B2

    公开(公告)日：2017-05-16

    申请号：US14654465

    申请日：2012-12-20

    Applicant: Intel Corporation

    Inventor： Julien Gamet ,  Faouzi Khechana

    IPC: G02B26/08 ,  G02B26/10 ,  G02B7/00

    CPC classification number: G02B26/101 ,  G02B7/008 ,  G02B26/085

    Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

    Optical micro-projection system and projection method
    8.
    发明授权
    Optical micro-projection system and projection method 有权
    光学微投影系统及投影方法

    公开(公告)号：US09374566B2

    公开(公告)日：2016-06-21

    申请号：US14681661

    申请日：2015-04-08

    Applicant: INTEL CORPORATION

    Inventor： Lucio Kilcher ,  Faouzi Khechana

    IPC: H04N9/31 ,  G03B21/14 ,  G01S7/481 ,  G01S17/42 ,  G06F3/01 ,  G06F3/03 ,  G01S17/10

    CPC classification number: H04N9/3194 ,  G01S7/4814 ,  G01S17/102 ,  G01S17/42 ,  G02B26/0833 ,  G06F3/017 ,  G06F3/0304 ,  H04N9/3129 ,  H04N9/3155 ,  H04N9/3185 ,  H04N9/3188

    Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising:—at least one photodiode (401, 601) for monitoring the light emission power of the laser light source;—an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.

    Abstract translation: 一种光学微投影系统，包括以下部件：至少一个激光光源（200,400,402,600）; 至少一个可移动镜（102,103,203），用于偏离来自所述光源的光，以允许在投影表面（104,301,303,306,603）上产生图像; 用于测量投影源和投影表面之间的距离（604）的自混合模块，所述自混合模块包括： - 用于监测激光光源的发光功率的至少一个光电二极管（401,601）; - 用于计算光功率变化的光功率变化计数器（605）; 所述镜的连续位移允许自混合模块提供所述投影表面的多个点的连续的投影距离测量。 还提供了一种用于光学微投影系统的投影方法和距离测量方法。

    MEMS micro-mirror device
    10.
    发明授权
    MEMS micro-mirror device 有权
    MEMS微镜器件

    公开(公告)号：US09285668B2

    公开(公告)日：2016-03-15

    申请号：US13706142

    申请日：2012-12-05

    Applicant: Intel Corporation

    Inventor： Nicolas Abele ,  Faouzi Khechana ,  Lucio Kilcher

    IPC: G03B21/28 ,  G02B26/08 ,  G02B26/10 ,  G02B26/00 ,  G03B21/14

    CPC classification number: G02B26/101 ,  G02B26/00 ,  G02B26/0833 ,  G03B21/14 ,  G03B21/2033 ,  G03B21/28 ,  H04N9/3129 ,  Y10T29/49

    Abstract: A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.

    Abstract translation: MEMS微镜器件包括：单个封装; 第一反射镜和第二反射镜，其中所述反射镜中的至少一个被配置为沿着振荡轴线振荡; 其中两个反射镜位于单个封装内，并且布置成使得当至少一个反射镜振荡时，入射在第一微镜上的光可以偏转到第二反射镜。

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