发明授权
US09323156B2 Optical system of a microlithographic projection exposure apparatus 有权
微光刻投影曝光装置的光学系统

Optical system of a microlithographic projection exposure apparatus
摘要:
An optical system of a microlithographic projection exposure apparatus includes at least one mirror arrangement having a plurality of mirror elements which are displaceable independently of each other for altering an angular distribution of the light reflected by the mirror arrangement. The optical system also includes a polarization-influencing optical arrangement including a first lambda/2 plate and at least one additional lambda/2 plate.
信息查询
0/0