发明授权
- 专利标题: Optical system of a microlithographic projection exposure apparatus
- 专利标题(中): 微光刻投影曝光装置的光学系统
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申请号: US13661381申请日: 2012-10-26
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公开(公告)号: US09323156B2公开(公告)日: 2016-04-26
- 发明人: Ingo Saenger , Olaf Dittmann , Joerg Zimmermann
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102010029905 20100610
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03F7/20
摘要:
An optical system of a microlithographic projection exposure apparatus includes at least one mirror arrangement having a plurality of mirror elements which are displaceable independently of each other for altering an angular distribution of the light reflected by the mirror arrangement. The optical system also includes a polarization-influencing optical arrangement including a first lambda/2 plate and at least one additional lambda/2 plate.
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