发明授权
US09324733B2 Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
有权
半导体互连中的受控弯曲结构和用于可拉伸电子学的纳米膜
- 专利标题: Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
- 专利标题(中): 半导体互连中的受控弯曲结构和用于可拉伸电子学的纳米膜
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申请号: US14220910申请日: 2014-03-20
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公开(公告)号: US09324733B2公开(公告)日: 2016-04-26
- 发明人: John A. Rogers , Matthew Meitl , Yugang Sun , Heung Cho Ko , Andrew Carlson , Won Mook Choi , Mark Stoykovich , Hanqing Jiang , Yonggang Huang , Ralph G. Nuzzo , Zhengtao Zhu , Etienne Menard , Dahl-Young Khang
- 申请人: The Board of Trustees of the University of Illinois
- 申请人地址: US IL Urbana
- 专利权人: The Board of Trustees of the University of Illinois
- 当前专利权人: The Board of Trustees of the University of Illinois
- 当前专利权人地址: US IL Urbana
- 代理机构: Lathrop & Gage LLP
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L27/12 ; H01L21/8258 ; H05K1/02 ; H01L21/02 ; H01L29/06 ; H05K3/20
摘要:
In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.
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