发明授权
- 专利标题: Method and device for active wedge error compensation between two objects that can be positioned substantially to parallel to each other
- 专利标题(中): 两个物体之间主动楔形误差补偿的方法和装置可以基本上相互平行
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申请号: US13261204申请日: 2011-02-14
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公开(公告)号: US09329473B2公开(公告)日: 2016-05-03
- 发明人: Sven Hansen , Matthias Conradi , Georg Fink
- 申请人: Sven Hansen , Matthias Conradi , Georg Fink
- 申请人地址: DE Garching
- 专利权人: SUSS MICROTEC LITHOGRAPHY GMBH
- 当前专利权人: SUSS MICROTEC LITHOGRAPHY GMBH
- 当前专利权人地址: DE Garching
- 代理机构: Hayes Soloway, P.C.
- 优先权: DE102010007970 20100215
- 国际申请: PCT/EP2011/052141 WO 20110214
- 国际公布: WO2011/098604 WO 20110818
- 主分类号: B29C43/58
- IPC分类号: B29C43/58 ; G03F7/00 ; B82Y10/00 ; B82Y40/00 ; B29C43/02
摘要:
The invention relates to a method and device for expanding the travel or control displacement of linear actuators that is available during an imprinting or embossing stroke. The wedge error compensating head (2) comprises a movable part (4), a stationary part (3) and at least three linear actuators (8). Each linear actuator (8) is connected to one of the parts (3, 4) at one end and to the other of the two parts (4, 3) by wedges (9) at the other end. By means of the wedges (9), it is possible to coarsely or roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators (8) are only used for fine or precision compensation for the wedge error. In this way, sufficient control displacement is available for the imprinting stroke with the linear actuators.
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