Invention Grant
US09331103B1 Liquid crystal display and manufacturing method thereof 有权
液晶显示及其制造方法

Liquid crystal display and manufacturing method thereof
Abstract:
A liquid crystal display includes a substrate, a gate line disposed on the substrate and including a bottom gate electrode, a first insulating layer covering the gate line, an active member including a channel which is disposed on the first insulating layer and overlaps the bottom gate electrode and a source electrode and a drain electrode at both end sides of the channel, a pixel electrode on the same layer as the active member, a second insulating layer covering the active member and the pixel electrode, a data line on the second insulating layer and connected to the active member, a passivation layer covering the data line, where the active member and the pixel electrode include an oxide semiconductor and the first insulating layer is a silicon nitride layer which includes a fluorine atom in the range of about 10 atm % to about 35 atm %.
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