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发明授权
US09331260B2 Piezoelectric mechanism having electrodes within thin film sheet that are substantially perpendicular to substrate 有权
在薄膜片内具有基本上垂直于衬底的电极的压电机构

Piezoelectric mechanism having electrodes within thin film sheet that are substantially perpendicular to substrate
摘要：
A piezoelectric actuator is formed by forming first and second electrodes on a substrate, and depositing a material on the substrate and between side surfaces of adjacent first and second electrodes to form a thin film sheet within which the first and the second electrodes extend from a first surface of the thin film sheet towards a second surface of the thin film sheet opposite the first surface. The second electrode is interdigitated in relation to the first electrode. The side surfaces of the first and the second electrodes are at least substantially perpendicular to the substrate. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet via application of a voltage across the first and the second electrodes.
摘要（中）：

通过在衬底上形成第一和第二电极并在衬底上和相邻的第一和第二电极的侧表面之间沉积材料以形成薄膜片而形成压电致动器，其中第一和第二电极从第一和第二电极延伸 薄膜片的表面朝向与第一表面相对的薄膜片的第二表面。 第二电极相对于第一电极交错。 第一和第二电极的侧表面至少基本上垂直于衬底。 薄膜片通过施加跨越第一和第二电极的电压而响应于在薄膜片内感应的电场物理变形。

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