发明授权
US09332651B2 Process for producing structure with metal film, mother die for use in the process, and structure produced by the process
有权
用金属膜制造结构的方法,用于该方法的母模,以及由该方法生产的结构
- 专利标题: Process for producing structure with metal film, mother die for use in the process, and structure produced by the process
- 专利标题(中): 用金属膜制造结构的方法,用于该方法的母模,以及由该方法生产的结构
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申请号: US12675537申请日: 2009-02-09
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公开(公告)号: US09332651B2公开(公告)日: 2016-05-03
- 发明人: Jun Taniguchi
- 申请人: Jun Taniguchi
- 申请人地址: JP Tokyo
- 专利权人: TOKYO UNIVERSITY OF SCIENCE FOUNDATION
- 当前专利权人: TOKYO UNIVERSITY OF SCIENCE FOUNDATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: JP2008-029631 20080208; JP2008-233873 20080911
- 国际申请: PCT/JP2009/052183 WO 20090209
- 国际公布: WO2009/099235 WO 20090813
- 主分类号: H05K3/00
- IPC分类号: H05K3/00 ; H05K3/20 ; C23C4/18 ; C23C14/00 ; C23C14/02 ; C23C14/16 ; C23C26/00
摘要:
The invention provides is a process for producing a structure (22) with a metal film, including the steps of preparing a mother die (10) in which a first metal film (16) is formed on the surface of a base (12) on which a concave and convex pattern (14) is formed, forming a second metal film (18) on the first metal film (16), adhering a support member (20) to the second metal film (18), and separating the second metal film (18) to which the concave and convex pattern has been transferred to the second metal film (18) together with the support member from the first metal film (16). Preferably, the first metal film (16) is a film containing Cr and Al, and the second metal film (18) is a film containing at least one metal selected from the group consisting of Au, Ag, Cu, Al, and Pt.
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