发明授权
US09332651B2 Process for producing structure with metal film, mother die for use in the process, and structure produced by the process 有权
用金属膜制造结构的方法,用于该方法的母模,以及由该方法生产的结构

Process for producing structure with metal film, mother die for use in the process, and structure produced by the process
摘要:
The invention provides is a process for producing a structure (22) with a metal film, including the steps of preparing a mother die (10) in which a first metal film (16) is formed on the surface of a base (12) on which a concave and convex pattern (14) is formed, forming a second metal film (18) on the first metal film (16), adhering a support member (20) to the second metal film (18), and separating the second metal film (18) to which the concave and convex pattern has been transferred to the second metal film (18) together with the support member from the first metal film (16). Preferably, the first metal film (16) is a film containing Cr and Al, and the second metal film (18) is a film containing at least one metal selected from the group consisting of Au, Ag, Cu, Al, and Pt.
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