发明授权
- 专利标题: Method for adjusting height position of polishing head and method for polishing workpiece
- 专利标题(中): 抛光头高度位置调整方法及抛光工件方法
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申请号: US14112084申请日: 2012-04-25
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公开(公告)号: US09333618B2公开(公告)日: 2016-05-10
- 发明人: Takashi Aratani
- 申请人: Takashi Aratani
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2011-118744 20110527
- 国际申请: PCT/JP2012/002826 WO 20120425
- 国际公布: WO2012/164820 WO 20121206
- 主分类号: B24B49/16
- IPC分类号: B24B49/16 ; B24B37/04 ; B24B37/005 ; B24B37/10 ; B24B49/10 ; B24B37/30 ; B24B49/12 ; H01L21/02
摘要:
A method for adjusting a height position of a polishing head, comprising moving the polishing head to a height position at which the polishing head comes in noncontact with the polishing pad with the polishing head holding no workpiece, and then rotating at least one of the polishing head and the turn table; measuring the load torque current of the at least one of the polishing head and the turn table rotated with the torque-measuring mechanism while the height-adjusting mechanism moves the polishing head toward the polishing pad until the polishing head contacts the polishing pad, and recording the height position of the polishing head as a reference position when a variation in the measured load torque current exceeds a threshold; and adjusting the height position of the polishing head to the predetermined position on the basis of a distance from the reference position.
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