Invention Grant
- Patent Title: Imprinting apparatus and imprinting method using the same
- Patent Title (中): 压印装置和使用其的压印方法
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Application No.: US14218468Application Date: 2014-03-18
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Publication No.: US09333700B2Publication Date: 2016-05-10
- Inventor: Doo Hee Jang , Tae Joon Song , Dhang Kwon , Hang Sup Cho , Seong Pil Cho , Ho Su Kim , Jin Hee Jang
- Applicant: LG DISPLAY CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG DISPLAY CO., LTD.
- Current Assignee: LG DISPLAY CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Dentons US LLP
- Priority: KR10-2010-0053282 20100607
- Main IPC: B29C59/02
- IPC: B29C59/02 ; B82Y10/00 ; B82Y40/00 ; G03F7/00 ; H01L21/683

Abstract:
Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.
Public/Granted literature
- US20140199426A1 IMPRINTING APPARATUS AND IMPRINTING METHOD USING THE SAME Public/Granted day:2014-07-17
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