Invention Grant
- Patent Title: Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope
- Patent Title (中): 扫描粒子显微镜和扫描粒子显微镜的粒子束位置变化的测定方法
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Application No.: US14755264Application Date: 2015-06-30
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Publication No.: US09336983B2Publication Date: 2016-05-10
- Inventor: Michael Budach , Christof Baur , Dajana Cujas , Robert Heberlein , Marion Batz
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102014212563 20140630
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/26 ; H01J37/28
Abstract:
The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.
Public/Granted literature
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