- Patent Title: FinFET with active region shaped structures and channel separation
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Application No.: US14656649Application Date: 2015-03-12
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Publication No.: US09337340B2Publication Date: 2016-05-10
- Inventor: Min-Hwa Chi , Hoong Shing Wong
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Wayne F. Reinke, Esq.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/22 ; H01L29/20 ; H01L29/66

Abstract:
A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed.
Public/Granted literature
- US20150187947A1 FINFET WITH ACTIVE REGION SHAPED STRUCTURES AND CHANNEL SEPARATION Public/Granted day:2015-07-02
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