Invention Grant
US09337802B2 Resonator filter having a recess in insulating material of a multi-layered coupling structure
有权
谐振器滤波器，在多层耦合结构的绝缘材料中具有凹陷
- Patent Title: Resonator filter having a recess in insulating material of a multi-layered coupling structure
- Patent Title (中): 谐振器滤波器，在多层耦合结构的绝缘材料中具有凹陷
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Application No.: US14201914Application Date: 2014-03-09
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Publication No.: US09337802B2Publication Date: 2016-05-10
- Inventor: Ming-Shun Hsu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/205 ; H03H9/58
Abstract:
A resonator filter includes a substrate, a bottom electrode formed on the substrate, a multi-layered coupling structure formed on the bottom electrode, a top electrode formed on the multi-layered coupling structure, a first piezoelectric layer sandwiched in between the bottom electrode and the multi-layered coupling structure, and a second piezoelectric layer sandwiched in between the multi-layered coupling structure and the top electrode. The multi-layered coupling structure includes at least an insulating material.
Public/Granted literature
- US20150256146A1 RESONATOR FILTER Public/Granted day:2015-09-10
Information query
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