发明授权
- 专利标题: Process for growing silicon carbide single crystal by physical vapor transport method and annealing silicon carbide single crystal in situ
- 专利标题(中): 通过物理气相传输方法生长碳化硅单晶并原位退火碳化硅单晶的工艺
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申请号: US13994306申请日: 2011-11-11
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公开(公告)号: US09340898B2公开(公告)日: 2016-05-17
- 发明人: Xiaolong Chen , Bo Wang , Longyuan Li , Tonghua Peng , Chunjun Liu , Wenjun Wang , Gang Wang
- 申请人: Xiaolong Chen , Bo Wang , Longyuan Li , Tonghua Peng , Chunjun Liu , Wenjun Wang , Gang Wang
- 申请人地址: CN Beijing CN Beijing
- 专利权人: Tankeblue Semiconductor Co. Ltd.,Institute of Physics Chinese Academy of Sciences
- 当前专利权人: Tankeblue Semiconductor Co. Ltd.,Institute of Physics Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing CN Beijing
- 代理商 D. Peter Hochberg; Sean F. Mellino
- 优先权: CN201010588052 20101214
- 国际申请: PCT/CN2011/082107 WO 20111111
- 国际公布: WO2012/079439 WO 20120621
- 主分类号: C30B23/06
- IPC分类号: C30B23/06 ; C30B23/00 ; C30B29/36 ; C30B33/02
摘要:
A technology for growing silicon carbide single crystals by PVT (Physical Vapor Transport) and a technology for in-situ annealing the crystals after growth is finished is provided. The technology can achieve real-time dynamic control of the temperature distribution of growth chamber by regulating the position of the insulation layer on the upper part of the graphite crucible, thus controlling the temperature distribution of growth chamber in real-time during the growth process according to the needs of the technology, which helps to significantly improve the crystal quality and production yield. After growth is finished, the inert gas pressure in growth chamber is raised and the temperature gradient of the growth chamber is reduced so that in-situ annealing the silicon carbide crystals can be carried out under a small one, which helps to reduce the stress between the crystal and the crucible lid as well as that in sublimation grown crystals to reduce the breakage ratio and improve the yield ratio during the subsequent fabrication process.
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