Invention Grant
- Patent Title: MEMS apparatus with a movable waveguide section
- Patent Title (中): 具有可移动波导部分的MEMS装置
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Application No.: US14106172Application Date: 2013-12-13
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Publication No.: US09341644B2Publication Date: 2016-05-17
- Inventor: David N. Hutchison , John Heck
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: G01P15/093
- IPC: G01P15/093 ; G01D5/26 ; G01P15/14 ; G02F1/025 ; G01C19/56 ; G02B26/08

Abstract:
Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing device, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output a first portion of the light beam, and a second waveguide having a section that is evanescently coupled to the first waveguide and configured to receive and output a second portion of the light beam. The section of the second waveguide is configured to be movable substantially parallel to the first waveguide, wherein a movement of the section of the second waveguide may be caused by an inertial change applied to the sensing device. The movement of the section may cause a detectable change in light intensity between the first and second portions of the light beam. Based on the detected change, the inertial change may be determined. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20150316580A1 OPTOMECHANICAL SENSOR FOR ACCELEROMETRY AND GYROSCOPY Public/Granted day:2015-11-05
Information query
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