发明授权
US09343260B2 Multipole and charged particle radiation apparatus using the same 有权
使用其的多极和带电粒子辐射装置

Multipole and charged particle radiation apparatus using the same
摘要:
In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.
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