发明授权
- 专利标题: Multipole and charged particle radiation apparatus using the same
- 专利标题(中): 使用其的多极和带电粒子辐射装置
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申请号: US14000236申请日: 2012-02-29
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公开(公告)号: US09343260B2公开(公告)日: 2016-05-17
- 发明人: Kotoko Urano , Takeshi Kawasaki , Noboru Moriya , Tomonori Nakano
- 申请人: Kotoko Urano , Takeshi Kawasaki , Noboru Moriya , Tomonori Nakano
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Baker Botts L.L.P.
- 优先权: JP2011-073877 20110330
- 国际申请: PCT/JP2012/001360 WO 20120229
- 国际公布: WO2012/132228 WO 20121004
- 主分类号: H01J3/14
- IPC分类号: H01J3/14 ; H01J37/153
摘要:
In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.
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