Invention Grant
US09343350B2 Anti-slip end effector for transporting workpiece using van der waals force
有权
防滑端部执行器，用于使用范德华力传输工件
- Patent Title: Anti-slip end effector for transporting workpiece using van der waals force
- Patent Title (中): 防滑端部执行器，用于使用范德华力传输工件
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Application No.: US14244689Application Date: 2014-04-03
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Publication No.: US09343350B2Publication Date: 2016-05-17
- Inventor: Izumi Arai
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer LLP
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/677
Abstract:
An anti-slip end effector for transporting a workpiece, configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; and at least one anti-slip protrusion disposed in the workpiece-supporting area for supporting a backside of the workpiece, said anti-slip protrusion having a top face capable of contacting and adhering to the backside of the workpiece by van der Waals force and capable of pivoting on a pivot axis, said pivot axis being disposed away from a center of the top face as viewed from above.
Public/Granted literature
- US20150287626A1 Anti-Slip End Effector For Transporting Workpiece Using Van Der Waals Force Public/Granted day:2015-10-08
Information query
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