Invention Grant
- Patent Title: Semiconductor device including a gate electrode on a protruding group III-V material layer and method of manufacturing the semiconductor device
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Application No.: US14718968Application Date: 2015-05-21
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Publication No.: US09343564B2Publication Date: 2016-05-17
- Inventor: Young-jin Cho , Kyoung-yeon Kim , Sang-moon Lee , Ki-ha Hong , Eui-chul Hwang
- Applicant: Young-jin Cho , Kyoung-yeon Kim , Sang-moon Lee , Ki-ha Hong , Eui-chul Hwang
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2011-0119125 20111115
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/778 ; H01L29/66 ; H01L29/20 ; H01L29/78 ; H01L21/02 ; H01L29/12

Abstract:
A semiconductor device including a group III-V barrier and a method of manufacturing the semiconductor device, the semiconductor device including: a substrate, insulation layers formed to be spaced apart on the substrate, a group III-V material layer for filling the space between the insulation layers and having a portion protruding higher than the insulation layers, a barrier layer for covering the side and upper surfaces of the protruding portion of the group III-V material layer and having a bandgap larger than that of the group III-V material layer, a gate insulation film for covering the surface of the barrier layer, a gate electrode formed on the gate insulation film, and source and drain electrodes formed apart from the gate electrode. The overall composition of the group III-V material layer is uniform. The barrier layer may include a group III-V material for forming a quantum well.
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