Invention Grant
- Patent Title: Cleanroom
- Patent Title (中): 整理房间
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Application No.: US13642545Application Date: 2012-10-09
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Publication No.: US09347681B2Publication Date: 2016-05-24
- Inventor: Yunshao Jiang , Chunhao Wu , Kunhsien Lin , Yongqiang Wang , Zhiyou Shu , Zhenhua Guo
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201210363872 20120926
- International Application: PCT/CN2012/082617 WO 20121009
- International Announcement: WO2014/047960 WO 20140403
- Main IPC: B01L1/04
- IPC: B01L1/04 ; F24F13/28 ; F24F3/16

Abstract:
The present invention provides a cleanroom for storing glass substrates, and which comprises an exhaust is disposed on a bottom floor of the cleanroom. A first filtering device is arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom. A second filtering device is arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom. The present invention can readily resolve the prior art issue in which the airborne particles stirred by turbulence within the cleanroom cannot be effectively eliminated.
Public/Granted literature
- US20140087650A1 Cleanroom Public/Granted day:2014-03-27
Information query
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